DocumentCode
3297091
Title
Uncertainties in Coplanar Waveguide Capacitance Measurements
Author
Arz, Uwe ; Leinhos, Jens ; Schubert, Dirk
Author_Institution
Phys.-Tech. Bundesanstalt, Braunschweig
fYear
2006
fDate
9-12 May 2006
Firstpage
165
Lastpage
167
Abstract
We apply two capacitance measurement methods based on on-wafer scattering parameter measurements in the frequency range 50 MHz to 50 GHz to coplanar waveguides fabricated on different substrate materials. We discuss uncertainties obtained from repeated measurements and illustrate the effect of capacitance uncertainties on the reference impedance of thru-reflect-line (TRL) calibrations
Keywords
III-V semiconductors; S-parameters; coplanar waveguides; gallium arsenide; 50 MHz to 50 GHz; GaAs; GaAs substrate; coplanar waveguide capacitance measurements; on-wafer scattering parameter measurements; substrate materials; thru-reflect-line calibrations; Calibration; Capacitance measurement; Conductors; Coplanar waveguides; Frequency; Impedance measurement; Measurement standards; Propagation constant; Scattering parameters; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
Signal Propagation on Interconnects, 2006. IEEE Workshop on
Conference_Location
Berlin, Germany
Print_ISBN
1-4244-0455-x
Electronic_ISBN
1-4244-0455-x
Type
conf
DOI
10.1109/SPI.2006.289162
Filename
4069444
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