Title :
Electron Emission From Gated Pt Emitters Fabricated By Electron Beam Induced Deposition
Author :
Takai, M. ; Morimoto, H. ; Kishimoto, T. ; Lipp, S. ; Frey, L. ; Ryssel, H. ; Yura, S. ; Hosono, A. ; Okuda, S.
Author_Institution :
Faculty of Engineering Science and Research Center for Ultra Science, Osaka University, Japan
Keywords :
Argon; Atmosphere; Electron beams; Electron emission; Field emitter arrays; Gold; Hydrogen; Insulation; Research and development; Silicon on insulator technology;
Conference_Titel :
Vacuum Microelectronics Conference, 1996. IVMC'96., 9th International
Print_ISBN :
0-7803-3594-5
DOI :
10.1109/IVMC.1996.601914