DocumentCode
3297239
Title
Field emission properties of diamond thin films
Author
Bakhtizin, R.Z. ; Yamaguzing, Yu.M. ; Pshenichnyuk, S.A.
Author_Institution
Dept of Phys. Electron., Bashkir State Univ., Ufa, Russia
fYear
1996
fDate
7-12 Jul 1996
Firstpage
658
Abstract
Summary form only given, as follows. Si tips coated with thin diamond films show considerable promise for use in field emission cathodes because these films demonstrate an air-stable negative electron affinity surface. Such a surface may allow for fields emission at low electric field under poor vacuum conditions. In this work, a new technique for preparation of high quality diamond films with low impurity contamination has been developed. This technique is based on deposition of low energy C+ ions. These ions have been generated in duoplasmatron and directed to the Si tip via the beam forming system and mass-separation with Wien´s filter. A study aimed an understanding the electronic properties of diamond adsorbed on the Si surface has been carried out by means of probe-hole I-V characteristics measurements and field emission electron spectroscopy as well. The paper reports on recent findings to emerge from the above study, and presents a pertinent model to explain the significant changes in energy spectra of field emitted electrons. Finally, we discuss the possible mechanism of electron transport in such a system
Keywords
diamond; electron affinity; electron field emission; electron spectroscopy; elemental semiconductors; semiconductor growth; semiconductor thin films; silicon; vacuum microelectronics; vapour deposited coatings; vapour deposition; C-Si; Si; Wien filter; air-stable negative electron affinity surface; beam forming system; diamond coated Si tips; diamond thin films; duoplasmatron; electron transport; electronic properties; energy spectra; field emission cathodes; field emission electron spectroscopy; field emission properties; high quality film preparation; low energy C+ ion deposition; low impurity contamination; mass-separation; model; probe-hole I-V characteristics measurements; Cathodes; Electron emission; Filters; Impurities; Pollution measurement; Semiconductor films; Spectroscopy; Surface contamination; Transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Microelectronics Conference, 1996. IVMC'96., 9th International
Conference_Location
St. Petersburg
Print_ISBN
0-7803-3594-5
Type
conf
DOI
10.1109/IVMC.1996.601915
Filename
601915
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