• DocumentCode
    3297239
  • Title

    Field emission properties of diamond thin films

  • Author

    Bakhtizin, R.Z. ; Yamaguzing, Yu.M. ; Pshenichnyuk, S.A.

  • Author_Institution
    Dept of Phys. Electron., Bashkir State Univ., Ufa, Russia
  • fYear
    1996
  • fDate
    7-12 Jul 1996
  • Firstpage
    658
  • Abstract
    Summary form only given, as follows. Si tips coated with thin diamond films show considerable promise for use in field emission cathodes because these films demonstrate an air-stable negative electron affinity surface. Such a surface may allow for fields emission at low electric field under poor vacuum conditions. In this work, a new technique for preparation of high quality diamond films with low impurity contamination has been developed. This technique is based on deposition of low energy C+ ions. These ions have been generated in duoplasmatron and directed to the Si tip via the beam forming system and mass-separation with Wien´s filter. A study aimed an understanding the electronic properties of diamond adsorbed on the Si surface has been carried out by means of probe-hole I-V characteristics measurements and field emission electron spectroscopy as well. The paper reports on recent findings to emerge from the above study, and presents a pertinent model to explain the significant changes in energy spectra of field emitted electrons. Finally, we discuss the possible mechanism of electron transport in such a system
  • Keywords
    diamond; electron affinity; electron field emission; electron spectroscopy; elemental semiconductors; semiconductor growth; semiconductor thin films; silicon; vacuum microelectronics; vapour deposited coatings; vapour deposition; C-Si; Si; Wien filter; air-stable negative electron affinity surface; beam forming system; diamond coated Si tips; diamond thin films; duoplasmatron; electron transport; electronic properties; energy spectra; field emission cathodes; field emission electron spectroscopy; field emission properties; high quality film preparation; low energy C+ ion deposition; low impurity contamination; mass-separation; model; probe-hole I-V characteristics measurements; Cathodes; Electron emission; Filters; Impurities; Pollution measurement; Semiconductor films; Spectroscopy; Surface contamination; Transistors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Microelectronics Conference, 1996. IVMC'96., 9th International
  • Conference_Location
    St. Petersburg
  • Print_ISBN
    0-7803-3594-5
  • Type

    conf

  • DOI
    10.1109/IVMC.1996.601915
  • Filename
    601915