RL-Analysis of Meander Shaped Adjustment Modules

The impact of parasitic effects in current integrated circuits is important. One reason for this fact is the increasing operating frequency in current circuits. The router PARSY (parasitic symmetric router) is developed for routing sensitive nets. Its goal is the even distribution of parasitic effects on nets within a net pair or net group. The even distribution of the resistance is made by using meander shaped adjustment modules. In this paper we show the electrical characteristics of these adjustment modules. Moreover, we analyze the adjustment modules in their area of application. An analysis process is developed which enables the investigation of layout structures. It is bases on the three-dimensional inductance extraction program FASTHENRY (M. Kumon et al., 1994)