Title :
Victim and aggressor line electrical modelisation in an multicoupled interconnect environment for transient simulation
Author :
Ponchel, F. ; Legier, Jf ; Paleczny, E. ; Seguinot, C. ; Deschacht, D.
Author_Institution :
IEMN, Villeneuve d´´Ascq
Abstract :
An electrical modelisation of eight lossy Cu interconnects is proposed thanks to the implementation of a vector finite element method. This full wave analysis gives frequency dependence of proper or mutual inductance, capacitance or resistance from resulting transmission line equations system. Spice results are then proposed for different set of spacing and low dielectric material in case of interconnects whose area is less than 1 m2 embedded in SiO2 interlevel or other low dielectric material
Keywords :
dielectric materials; finite element analysis; interconnections; metallisation; transmission line theory; aggressor line electrical modelisation; dielectric material; full wave analysis; multicoupled interconnect environment; mutual inductance; transient simulation; transmission line equations system; vector finite element method; Clocks; Conductivity; Dielectric losses; Dielectric materials; Finite element methods; Frequency; Mathematical model; Metallization; Power system transients; Shape;
Conference_Titel :
Signal Propagation on Interconnects, 2006. IEEE Workshop on
Conference_Location :
Berlin, Germany
Print_ISBN :
1-4244-0455-x
Electronic_ISBN :
1-4244-0455-x
DOI :
10.1109/SPI.2006.289235