CMOS design and implementation of sigma-delta analog-to-digital data converter suitable for MEMS devices

Author

Nordin, Anis Nurashikin ; Zaghloul, Mona

Author_Institution

Dept. of Electr. & Comput. Eng., George Washington Univ., DC, USA

Volume

1

fYear

2002

fDate

4-7 Aug. 2002

Abstract

MicroElectroMechanical systems (MEMS) are rapidly gaining popularity over a wide range of applications today. An example of full integration in MEMS is the smart sensor where both the sensors and the electrical signal processing circuitry are placed on the same chip. The idea is to place the sensor as close as possible to the signal-processing interface to avoid signal degradation. In this paper we present the design and implementation of an interface circuit for CMOS sensor systems. A first-order sigma-delta (ΣΔ) analog-to-digital converter was designed and simulated using Cadence and SpectreS. An experimental prototype of the 10-bit ΣΔ modulator was then fabricated using 1.6 um CMOS technology through MOSIS.

Keywords

CMOS integrated circuits; intelligent sensors; microsensors; sigma-delta modulation; 1.6 micron; 10 bit; CMOS technology; Cadence; MEMS device; SpectreS; interface circuit; sigma-delta analog-to-digital converter; signal processing; smart sensor; Analog-digital conversion; CMOS technology; Circuits; Degradation; Delta-sigma modulation; Intelligent sensors; Microelectromechanical devices; Microelectromechanical systems; Micromechanical devices; Signal processing;

fLanguage

English

Publisher

ieee

Conference_Titel

Circuits and Systems, 2002. MWSCAS-2002. The 2002 45th Midwest Symposium on

Print_ISBN

0-7803-7523-8

Type

conf

DOI

10.1109/MWSCAS.2002.1187162

Filename

1187162