Three dimensional multifunctional nanomechanical photonic crystal sensor with high sensitivity by using pillar-inserted aslant nanocavity resonator

We propose a method to detect nanomechanical variations in the three dimensional space with a shoulder-coupled pillar-inserted aslant photonic crystal nanocavity resonator. FEM and 3D-FDTD simulation software are employed to investigate the sensing characteristics. With high quality factor of the aslant nanocavity and the optimized structure, high sensitivity of nanomechanical sensing can be achieved in three dimensions and the limitation of the smallest detectable variations is ultra small. For its ultra small size and ultra high sensitivity in every dimension, this versatile nanomechanical sensor can be widely used in MEMS.