Piezocomposite of fine PZT rods realized with synchrotron radiation lithography

Author

Hirata, Yoshihiro ; Nakaishi, Hlroyuki ; Numazawa, Toshiyuki ; Takada, Hiroshi

Author_Institution

Harima Res. Lab., Sumitomo Electr. Ind. Ltd., Japan

Volume

2

fYear

1997

fDate

5-8 Oct 1997

Firstpage

877

Abstract

A ceramics micro fabrication technique has been developed for the 1-3 piezocomposite which is suitable for high frequency, wideband ultrasound transducers. This process employs synchrotron radiation (SR) lithography and a micro molding process, generally called the “LIGA process”. This process realized an array of lead zirconate titanate (PZT) rods whose cross section is 25 micron. The composite made up of circular sectional PZT rods was clarified not to have an internal lateral frequency mode and it is available over a wide frequency range. The piezocomposite was clarified as having predicted merits, and was thought to contribute to the improvement of the resolution

Keywords

X-ray lithography; composite materials; lead compounds; materials preparation; permittivity; piezoceramics; ultrasonic transducers; HF wideband ultrasound transducers; LIGA process; PZT; PbZrO3TiO3; ceramics micro fabrication technique; fine PZT rods; internal lateral frequency mode; medical ultrasonic diagnosis; micro molding process; piezocomposite; resolution; synchrotron radiation lithography; Ceramics; Fabrication; Frequency; Lithography; Strontium; Synchrotron radiation; Titanium compounds; Ultra wideband technology; Ultrasonic imaging; Ultrasonic transducers;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 1997. Proceedings., 1997 IEEE

Conference_Location

Toronto, Ont.

ISSN

1051-0117

Print_ISBN

0-7803-4153-8

Type

conf

DOI

10.1109/ULTSYM.1997.661721

Filename

661721