DocumentCode
3299717
Title
Novel high voltage SOI structures
Author
Huang, A.Q. ; Li, X. ; Sun, N.X.
Author_Institution
Center for Power Electron. Syst., Virginia Polytech. Inst. & State Univ., Blacksburg, VA, USA
fYear
1999
fDate
1999
Firstpage
84
Lastpage
88
Abstract
This paper proposes several new device structures suitable for realizing high voltage power devices in thin SOI layer. Both analytical and simulation results show that the on-resistance of a unipolar device based on these structures is significantly reduced and the figure-of-merit, Ron/VB, can be an order of magnitude smaller than the theoretical limitation of vertical power devices
Keywords
CMOS integrated circuits; power integrated circuits; silicon-on-insulator; CMOS ICs; Si; figure-of-merit; high voltage SOI structures; high-voltage ICs; on-resistance; unipolar device; vertical power devices; Analytical models; Boundary conditions; Circuits; Doping; Parasitic capacitance; Power electronics; Silicon on insulator technology; Sun; Thyristors; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Bipolar/BiCMOS Circuits and Technology Meeting, 1999. Proceedings of the 1999
Conference_Location
Minneapolis, MN
ISSN
1088-5714-0
Print_ISBN
0-7803-5712-4
Type
conf
DOI
10.1109/BIPOL.1999.803532
Filename
803532
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