Title :
Extraction and modelling of thermal behavior in trench isolated bipolar structures
Author :
Walkey, David J. ; Smy, Tom J. ; Marchesan, David ; Tran, Hai ; Reimer, Chris ; Kleckner, Todd C. ; Jackson, Michael K. ; Schroter, Michael ; Long, John R.
Author_Institution :
Dept. of Electron., Carleton Univ., Ottawa, Ont., Canada
Abstract :
A new thermal dissipation mechanism in small geometry trench isolated devices is demonstrated through measurement and simulation. Limitations on the extraction and performance of single and double exponential transient thermal models are illustrated using measurements on devices with a wide range of geometries
Keywords :
bipolar integrated circuits; integrated circuit measurement; integrated circuit modelling; isolation technology; thermal analysis; thermal resistance; exponential transient thermal models; small geometry trench isolated devices; thermal behavior extraction; thermal behaviour modelling; thermal dissipation mechanism; trench isolated bipolar structures; Capacitance; Circuit simulation; Computer networks; Conducting materials; Geometry; Pulse measurements; Solid modeling; Temperature; Thermal conductivity; Thermal resistance;
Conference_Titel :
Bipolar/BiCMOS Circuits and Technology Meeting, 1999. Proceedings of the 1999
Conference_Location :
Minneapolis, MN
Print_ISBN :
0-7803-5712-4
DOI :
10.1109/BIPOL.1999.803535