• DocumentCode
    3299884
  • Title

    Hysteresis compensation for Piezoelectric tube scanner in atomic force microscopy

  • Author

    Othman, Yahya Sherif ; Mahmood, Iskandar A. ; Rashid, Nahrul Khair Alang Md

  • Author_Institution
    Dept. of Mechatron. Eng., Int. Islamic Univ. Malaysia, Kuala Lumpur, Malaysia
  • fYear
    2012
  • fDate
    5-7 Jan. 2012
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    In this paper, a radial basis function neural network (RBFNN) is designed and used for such purpose. The network is used in conjunction with a self-tuning PID controller. The differential equation of Jenkine element is adopted for hysteresis modeling. The simulation results show that the proposed controller improves the system performance better than open loop system and direct closed loop system by minimizing the effect of hysteresis.
  • Keywords
    atomic force microscopy; differential equations; piezoelectric devices; radial basis function networks; three-term control; Jenkine element; RBFNN; atomic force microscopy; hysteresis compensation; hysteresis modeling; piezoelectric tube scanner; radial basis function neural network; self-tuning PID controller; Atomic force microscopy; Electron tubes; Hysteresis; Laser beams; Mathematical model; Tracking loops;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Enabling Science and Nanotechnology (ESciNano), 2012 International Conference on
  • Conference_Location
    Johor Bahru
  • Print_ISBN
    978-1-4577-0799-5
  • Type

    conf

  • DOI
    10.1109/ESciNano.2012.6149633
  • Filename
    6149633
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3299884