DocumentCode
3300009
Title
Failure analysis of die crack in lidless packages
Author
Foo, F.J. ; Ong, M.C. ; Tay, M.Y.
Author_Institution
Device Anal. Lab., Adv. Micro Devices (Singapore) Pte Ltd., Singapore, Singapore
fYear
2010
fDate
5-9 July 2010
Firstpage
1
Lastpage
5
Abstract
Form factor requires lidless IC packages and die crack is one potential failure for exposed silicon dies. FA techniques such as SEM, FIB, and LSM are used to characterize the cracks to identity where they occur. The results also revealed intrinsic flaws that reduce the fracture strength of the die, making the die susceptible to cracking.
Keywords
cracks; failure analysis; integrated circuit packaging; FA techniques; FIB; SEM; die crack failure analysis; lidless IC packages; silicon dies; Assembly; Costs; Failure analysis; Flip chip; Integrated circuit packaging; Optical microscopy; Scanning electron microscopy; Silicon; Stress; Testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Physical and Failure Analysis of Integrated Circuits (IPFA), 2010 17th IEEE International Symposium on the
Conference_Location
Singapore
ISSN
1946-1542
Print_ISBN
978-1-4244-5596-6
Type
conf
DOI
10.1109/IPFA.2010.5532238
Filename
5532238
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