Title :
Theory and numerical analysis of bulk acoustic wave multilayer composite resonator structure
Author :
Mansfeld, G.D. ; Alekseev, S.G.
Author_Institution :
Inst. of Radio Eng. & Electron., Acad. of Sci., Moscow, Russia
Abstract :
Rigorous analytical expressions describing multilayer BAW microwave composite resonator-filter with input and output electrodes and taking into account wave properties and acoustic losses of all layers of the structure are obtained. The results are represented in the form of simple Z-coefficients connecting input and output voltages and currents. A special case of the multilayer λ/4 substrate providing one mode operation is analyzed and discussed. All the results are illustrated with numerical calculations
Keywords :
acoustic microwave devices; acoustic resonator filters; bulk acoustic wave devices; microwave filters; Z-coefficients; acoustic losses; bulk acoustic wave multilayer composite resonator; currents; input electrodes; multilayer λ/4 substrate; numerical analysis; numerical calculations; one mode operation; output electrodes; voltages; Acoustic waves; Electrodes; Joining processes; Nonhomogeneous media; Numerical analysis; Q factor; Stress; Substrates; Transistors; Voltage;
Conference_Titel :
Ultrasonics Symposium, 1997. Proceedings., 1997 IEEE
Conference_Location :
Toronto, Ont.
Print_ISBN :
0-7803-4153-8
DOI :
10.1109/ULTSYM.1997.661724
