Differential measurement and parameter extraction of symmetrical inductors

Measurements and extraction of Q-value and self-resonance frequency of on-chip differential symmetrical inductors have been performed. Both 1-port and 2-port measurements have been carried out. In the 1-port measurements a high frequency broadband 180° hybrid was used to generate differential signals. The inductor was then excited by the same kind of signals in the measurement as when used in a real differential circuit. The measurement results agree well with simulations using FastHenry in combination with the free inductor optimization program. Indentro, verifying these tools.