Title :
Applications of image processing (IP) method on the structure measurements in porous GaN
Author :
Mahmood, Ainorkhilah ; Ahmed, Naser Mahmoud ; Ramizy, Asmiet ; Hassan, Zainuriah ; Kwong, Yam Fong ; Siang, Chuah Lee ; Yunus, Mohd Bukhari Md
Author_Institution :
Nano-Optoelectron. Res. & Technol. Lab., Univ. Sains Malaysia, Minden, Malaysia
Abstract :
In this work, porous GaN was prepared by UV assisted electrochemical etching method. This method was employed in this work due to several advantages such as low processing temperature, low structural damage, process simplicity, versatility and low processing cost. The sample is required to be connected to power supply and biased positive and ultra-violet (UV) illumination is used to assist in the generation of electron-hole pairs. The porous GaN structures fabrication and their quantitative structural characteristics study are based on mathematical morphology analysis by using the scanning electrons microscope (SEM) images. The quality of porous GaN quality can be carried out by performing a nondestructive investigation of its nanostructures which can be performed by adapting image analysis techniques to obtain rapid, objective and quantitative information.
Keywords :
III-V semiconductors; electrochemical analysis; etching; gallium compounds; image processing; nondestructive testing; porous semiconductors; scanning electron microscopy; semiconductor growth; ultraviolet spectra; wide band gap semiconductors; GaN; SEM; UV assisted electrochemical etching method; electron-hole pairs; image processing method; low processing cost; low processing temperature; low structural damage; mathematical morphology analysis; nondestructive investigation; porous structures fabrication; power supply; process simplicity; scanning electrons microscopy image; structural characteristics; structure measurements; ultra-violet illumination; versatility; Etching; Gallium nitride; Grain boundaries; MATLAB; Physics; Scanning electron microscopy; Surface morphology;
Conference_Titel :
Enabling Science and Nanotechnology (ESciNano), 2012 International Conference on
Conference_Location :
Johor Bahru
Print_ISBN :
978-1-4577-0799-5
DOI :
10.1109/ESciNano.2012.6149665