Title :
A GasFET for chlorine detection
Author :
Knittel, T. ; Freitag, Gunter ; Widanarto, W. ; Eisele, I.
Author_Institution :
Inst. of Phys., German Fed. Armed Forces Univ., Munich
fDate :
Oct. 30 2005-Nov. 3 2005
Abstract :
The work function potential shift due to the chemical reaction of gold in a chlorine gas ambient is electrically measured. The sensor principle is based on a hybrid suspended gate field effect transistor. Gas measurements show that at 190degC a reversible chlorine detection without any cross sensitivities to other gas species is possible
Keywords :
field effect devices; gas sensors; 190 C; GasFET; chemical reaction; gold; hybrid suspended gate field effect transistor; reversible chlorine detection; CMOS technology; Chemical sensors; Chemical technology; Chemical transducers; Contacts; Electrodes; FETs; Gas detectors; Gold; MOSFETs;
Conference_Titel :
Sensors, 2005 IEEE
Conference_Location :
Irvine, CA
Print_ISBN :
0-7803-9056-3
DOI :
10.1109/ICSENS.2005.1597649
