Micromachined tunable bandstop filters for wireless sensor networks

Author

Karim, M.F. ; Liu, A.Q. ; Yu, A.B. ; Alphones, A.

Author_Institution

Sch. of Electr. & Electron. Eng., Nanyang Technol. Univ.

fYear

2005

fDate

Oct. 30 2005-Nov. 3 2005

Abstract

A MEMS based tunable bandstop filter is proposed for the wireless sensor networks. A tunable band-stop filter (BSF) has been designed with flat response at a selected frequency by incorporating microelectromechanical systems (MEMS) bridges. An equivalent circuit model for the tunable bandstop filter is derived and its parameters are extracted by using commercial software. High resistivity silicon substrate and MEMS surface micromachining process are employed. The measurement results for the tunable band stop filter reveals a tuning range from 19 GHz to 17.3 GHz. Additionally, low-pass-band insertion loss is found to be 1.3-2.4 db

Keywords

band-stop filters; equivalent circuits; micromachining; wireless sensor networks; 1.3 to 2.4 dB; 17.3 to 19 GHz; equivalent circuit model; microelectromechanical systems; surface micromachining process; tunable bandstop filters; wireless sensor networks; Bridge circuits; Conductivity; Equivalent circuits; Filters; Frequency; Microelectromechanical systems; Micromechanical devices; Silicon; Tunable circuits and devices; Wireless sensor networks;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2005 IEEE

Conference_Location

Irvine, CA

Print_ISBN

0-7803-9056-3

Type

conf

DOI

10.1109/ICSENS.2005.1597658

Filename

1597658