Title :
ESD protection design with lateral DMOS transistor in 40-V BCD technology
Author :
Wang, Chang-Tzu ; Ker, Ming-Dou ; Tang, Tien-Hao ; Su, Kuan-Cheng
Author_Institution :
Reliability Technol. & Assurance Div., United Microelectron. Corp., Hsinchu, Taiwan
Abstract :
ESD protection designs for smart power applications with lateral double-diffused MOS (LDMOS) transistor were proposed. With the proposed ESD detection circuits, the n-channel LDMOS can be quickly turned on to protect the output drivers during ESD stress. The proposed ESD protection circuits have been successfully verified in a 0.35-μm 5-V/40-V bipolar CMOS DMOS (BCD) process. In addition, the power-rail ESD protection design can be also achieved with stacked structure to protect 40-V power pins without latchup issue in the smart power ICs.
Keywords :
MOS integrated circuits; electrostatic discharge; monolithic integrated circuits; power integrated circuits; BCD technology; ESD protection design; lateral DMOS transistor; lateral double-diffused MOS transistor; size 0.35 mum; smart power IC; smart power applications; stacked structure; voltage 40 V; voltage 5 V; Breakdown voltage; CMOS process; Clamps; Diodes; Driver circuits; Electrostatic discharge; MOSFETs; Pins; Protection; Stress;
Conference_Titel :
Physical and Failure Analysis of Integrated Circuits (IPFA), 2010 17th IEEE International Symposium on the
Conference_Location :
Singapore
Print_ISBN :
978-1-4244-5596-6
DOI :
10.1109/IPFA.2010.5532308