Physical vapor deposition of multilayer lead-zirconate-titanate films for ultrasonic transducer fabrication

Author

Kline-Schoder, Robert ; Onishi, Shinzo ; Desilets, Charles

Author_Institution

Creare Inc., Hanover, NH, USA

Volume

2

fYear

1997

fDate

5-8 Oct 1997

Firstpage

937

Abstract

Creare is developing microfabrication techniques to manufacture low-cost, two-dimensional ultrasonic transducer arrays with multilayer piezoelectric elements. The approach is scaleable for fabrication of arrays in the frequency range of 1-100 MHz in dense or sparse array designs. Our approach employs the following processes: (1) high-rate physical vapor deposition (sputtering) of high-quality, dense, perovskite lead-zirconate-titanate (PZT) films as the piezoelectric material using reactive sputtering of a metallic target and (2) photolithography and masking to provide the interlayer electrodes. A 50 μm thick PZT film was used to measure a thickness mode coupling coefficient of approximately 0.4

Keywords

electrodes; lead compounds; masks; photolithography; piezoelectric thin films; sputter deposition; ultrasonic transducer arrays; 1 to 100 MHz; 50 micron; PZT; PbZrO3TiO3; dense array designs; interlayer electrodes; masking; microfabrication techniques; multilayer piezoelectric elements; photolithography; physical vapor deposition; reactive sputtering; sparse array designs; thickness mode coupling coefficient; ultrasonic transducer fabrication; Chemical vapor deposition; Fabrication; Frequency; Manufacturing; Nonhomogeneous media; Piezoelectric films; Piezoelectric materials; Sputtering; Ultrasonic transducer arrays; Ultrasonic transducers;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 1997. Proceedings., 1997 IEEE

Conference_Location

Toronto, Ont.

ISSN

1051-0117

Print_ISBN

0-7803-4153-8

Type

conf

DOI

10.1109/ULTSYM.1997.661734

Filename

661734