Pressure-dependent damping characteristics of microsilicon beam resonators for different resonant modes

Author

Zhang, Weibin ; Turner, Kimberly L.

Author_Institution

Dept. of Mech. Eng., California Univ., Santa Barbara, CA

fYear

2005

fDate

Oct. 30 2005-Nov. 3 2005

Abstract

This paper is to investigate (experimentally and model-based) the resonant-mode dependence of microcantilevers\´ damping characteristics and how this dependence changes for different pressure ranges: air pressure (100Torr and higher), high vacuum (~ 1mTorr) and pressures in between. In air pressure, we focus on the damping caused by the fluid drag force. A frequency dependent fluid damping model is proposed and experimentally validated. At high vacuum, thermo-elastic damping (TED) is demonstrated to be the main damping source experimentally, for frequency range from 10Khz to 2MHz and up to 6 resonant modes. By proper design we are able to tell that the "effective" viscous damping is dominant in the transition pressure regime

Keywords

damping; drag; micromechanical resonators; 0.01 to 2 MHz; Q factor; damping characteristics; fluid damping model; fluid drag force; microsilicon beam resonators; thermo-elastic damping; transition pressure regime; viscous damping; Atomic force microscopy; Damping; Drag; Frequency dependence; Q factor; Resonance; Resonant frequency; Silicon; Structural beams; Testing;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2005 IEEE

Conference_Location

Irvine, CA

Print_ISBN

0-7803-9056-3

Type

conf

DOI

10.1109/ICSENS.2005.1597710

Filename

1597710