Silicon microelectrode array sensors for in situ field-based environmental monitoring

Silicon microelectrode array (MEA) sensors for in situ environmental monitoring have been successfully developed in this work. The sensors measure oxidation-reduction potential (ORP), which is important in many environmental applications, particularly those involving water quality monitoring and wastewater treatment. The electrochemical performance of these sensors was fully characterized by measuring redox potentials of standard and reference solutions as recommended by the American Society for Testing and Materials (ASTM). The silicon MEAs have substantially smaller sensing areas (mum vs. cm) than their current commercial counterparts and exhibit significantly faster response times (milliseconds vs. minutes). Further, the sensors are robust due to redundant array configuration and the material strength of silicon