Title :
Versatile wire configuration for independent actuation of bending and torsion displacements of microcantilevers
Author :
Venstra, W.J. ; Velden, M. Vander ; Spronck, J.W. ; van Eijk, J. ; Sarro, P.M.
Author_Institution :
Fac. of Mech. Eng., Adv. Mechatronics, Delft
fDate :
Oct. 30 2005-Nov. 3 2005
Abstract :
The deposition of three wires on the surface of a microcantilever enables both electrothermal and electromagnetic actuation of bending and torsional displacements. Four bending and four torsion modes of a 2700mum times 500mum times 30mum beam were excited electro-magnetically, and two bending and one torsion resonance were excited electrothermally
Keywords :
cantilevers; micromechanical devices; 2700 micron; 30 micron; 500 micron; electromagnetic actuation; electrothermal actuation; independent actuation; microcantilevers bending displacements; microcantilevers torsion displacements; wire configuration; Atomic force microscopy; Beams; Electromagnetic fields; Electromagnetic forces; Fabrication; Magnetic fields; Magnetic resonance; Probes; Silicon; Wire;
Conference_Titel :
Sensors, 2005 IEEE
Conference_Location :
Irvine, CA
Print_ISBN :
0-7803-9056-3
DOI :
10.1109/ICSENS.2005.1597766
