Design and characterization of high-sensitivity cantilevers

Author

Yu, Xiaomei ; Zhang, Haitao ; Li, Xiuhan ; Li, Ting ; Zhang, Dacheng

Author_Institution

Inst. of Microelectron., Peking Univ., Beijing

fYear

2005

fDate

Oct. 30 2005-Nov. 3 2005

Abstract

In order to increase the sensitivity of a cantilever-based biosensor, piezoresistive cantilevers with stress concentration holes were designed and fabricated. Firstly the stress distributions and the vertical displacements of the designed cantilevers were simulated through ANSYS analyzing system. Then the relative resistance changes of the piezoresistors as a function of the cantilever vertical displacements were measured. As expected, the stresses are highly concentrated for the designed cantilevers, and this design can obviously result in an improvement on the sensitivity of the surface-stress mode cantilevers

Keywords

cantilevers; microsensors; piezoresistive devices; ANSYS analyzing system; cantilever vertical displacements; cantilever-based biosensor; high-sensitivity cantilevers; piezoresistive cantilevers; piezoresistors; stress concentration holes; stress distributions; surface-stress mode cantilevers; Biomedical optical imaging; Biosensors; Electrical resistance measurement; Immune system; Integrated circuit measurements; Piezoresistance; Piezoresistive devices; Stress; Structural beams; Surface resistance;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2005 IEEE

Conference_Location

Irvine, CA

Print_ISBN

0-7803-9056-3

Type

conf

DOI

10.1109/ICSENS.2005.1597767

Filename

1597767