Title :
L-band RF characteristics of LTCC embedded spiral inductors
Author :
Eun, K.C. ; Lee, Y.C. ; Choi, B.G. ; Kim, D.J. ; Park, C.S.
Author_Institution :
Sch. of IT Eng., Inf. & Commun. Univ. (ICU), Taejeon, South Korea
Abstract :
Fully embedded structures of spiral inductors in a low loss dielectric multi-layer have been designed and fabricated using a low temperature co-fired ceramics (LTCC) technology for three-dimensional RF module integrations. The line width/space and the number of spiral layers of the embedded inductors were optimized for high Q-factor, high self-resonant frequency (SRF), process easiness, and compact size. With a same dimension and number of turns, embedded multi-layer spiral inductors reveal better performance in terms of Q-factor, SRF and the effective inductance than embedded planar spiral inductors. The optimized multi-layer spiral inductor shows maximum Q-factor of 56 and SRF of 3.6 GHz for 6.6 nH effective inductance at Qmax, while planar spiral inductors have maximum Q-factor of 49 and SRF of 3.0 GHz even for 5.8 nH.
Keywords :
Q-factor; ceramics; inductors; 3.6 GHz; L-band; LTCC technology; Q-factor; effective inductance; embedded spiral inductor; low-loss dielectric multilayer; self-resonant frequency; three-dimensional RF module; Ceramics; Dielectric losses; Inductance; Inductors; L-band; Q factor; Radio frequency; Space technology; Spirals; Temperature;
Conference_Titel :
Microwave and Millimeter Wave Technology, 2002. Proceedings. ICMMT 2002. 2002 3rd International Conference on
Print_ISBN :
0-7803-7486-X
DOI :
10.1109/ICMMT.2002.1187627
