Polymer-membrane-supported fin-line frequency multipliers

Two polymer-membrane-supported fin-line frequency multipliers were successfully realized on a 7-micron thick polymer membrane at a temperature below 100°C, using the previously published polymer-membrane based micromachining technologies. The said multipliers can generate from a microwave source a signal well beyond 100 GHz in the absence of any DC bias. Spectral domain measurements have been carried out on these frequency multipliers, and the experimental results suggest that the polymer-membrane based micromachining technologies can be used for realization of circuits operating at G-band frequencies.