Title :
Sol-gel fabricated thick piezoelectric ultrasonic transducers for potential applications in industrial material processes
Author :
Zou, L. ; Sayer, M. ; Jen, C.K.
Author_Institution :
Dept. of Phys., Queen´´s Univ., Kingston, Ont., Canada
Abstract :
Sol-gel fabricated thick film broadband piezoelectric ultrasonic transducers (UTs) operating at a frequency below 10 MHz are presented. The UTs are formed using thick PZT and LiNbO3 films which are ceramic-ceramic composites formed by dispersing PZT and LiNbO3 particles in a PZT and LiNbO3 sol-gel solution, respectively. Films are directly deposited on stainless steel substrates. Excellent broadband signals have been experimentally obtained with piezoelectric PZT and LiNbO3 films with 1 cm diameter and a thickness between 40-50 μm
Keywords :
lead compounds; lithium compounds; piezoceramics; piezoelectric transducers; sol-gel processing; thick film devices; ultrasonic transducers; 10 MHz; LiNbO3; PZT; PbZrO3TiO3; broadband signal; ceramic-ceramic composite; industrial material processing; piezoelectric ultrasonic transducer; sol-gel fabrication; stainless steel substrate; thick film; Frequency; Monitoring; Piezoelectric films; Piezoelectric materials; Polymers; Steel; Substrates; Textile industry; Thick films; Ultrasonic transducers;
Conference_Titel :
Ultrasonics Symposium, 1997. Proceedings., 1997 IEEE
Conference_Location :
Toronto, Ont.
Print_ISBN :
0-7803-4153-8
DOI :
10.1109/ULTSYM.1997.661751
