Microfabricated shear-sensitive tactile sensor for human-object interface studies

Author

Wang, Lin ; Beebe, David J.

Author_Institution

Dept. of Electr. & Comput. Eng., Illinois Univ., Urbana, IL, USA

Volume

2

fYear

1999

fDate

36434

Abstract

A silicon-based shear-force sensitive sensor is developed for the study of human-object interfaces. The sensor is designed based on the piezoresistive effect in silicon and fabricated using microfabrication technology. Detailed characterization of sensor prototypes is performed (linearity, R>0.98; repeatability, STD<8%). Shear sensing ability is demonstrated. Preliminary results of human subject tests are also described

Keywords

diaphragms; force sensors; microsensors; piezoresistive devices; silicon; strain gauges; tactile sensors; Si; diaphragm; durable flexible package; human-object interface studies; linearity; microfabrication; microsensor component; piezoresistive sensor; plantar surface; repeatability; shear sensing ability; shear-force sensitive sensor; shear-sensitive tactile sensor; strain gauges; tactile skin; Force measurement; Force sensors; Humans; Linearity; Prototypes; Sensor phenomena and characterization; Skin; Tactile sensors; Testing; Ultrasonic variables measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

[Engineering in Medicine and Biology, 1999. 21st Annual Conference and the 1999 Annual Fall Meetring of the Biomedical Engineering Society] BMES/EMBS Conference, 1999. Proceedings of the First Joint

Conference_Location

Atlanta, GA

ISSN

1094-687X

Print_ISBN

0-7803-5674-8

Type

conf

DOI

10.1109/IEMBS.1999.803992

Filename

803992