Title :
EPAS: a generic expert system for advising emitter piloting in IC manufacturing
Author_Institution :
Harris Semicond., Melbourne, FL, USA
Abstract :
The EPAS expert system is set up to advise fab operators how to adjust piloting cycle time for emitters based on knowledge extracted from the most experienced engineer. EPAS consists of a knowledge base containing all the knowledge extracted from the expert, a learning mechanism trying to calculate dynamically for the next lot the estimated initial drive time which is closer to the one actually required, a convergence control mechanism to control the rule inference so that the result of an inference is always closer to the conclusion, and a user facility module containing many Lisp-based modules developed to let the expert, engineers, and operators maintain the system by themselves
Keywords :
bipolar integrated circuits; electronic engineering computing; expert systems; integrated circuit manufacture; EPAS; IC manufacturing; Lisp-based modules; convergence control mechanism; emitter piloting; fab operators; generic expert system; knowledge base; learning mechanism; user facility module; Computer integrated manufacturing; Control systems; Diffusion processes; Expert systems; Knowledge engineering; Learning systems; Manufacturing processes; Research and development; Semiconductor device manufacture; Testing;
Conference_Titel :
Southeastcon '89. Proceedings. Energy and Information Technologies in the Southeast., IEEE
Conference_Location :
Columbia, SC
DOI :
10.1109/SECON.1989.132310
