DocumentCode
3305397
Title
Geneating Solid Models for VLSI Process and Device Simulation
Author
Lamb, Peter ; Hegarty, Christopher ; Hitschfeld, Nancy ; Fichtner, Wolfgang
Author_Institution
CSIRO Division of Information Technology, Centre for Spatial Information Systems
fYear
1992
fDate
31 May-1 Jun 1992
Firstpage
175
Lastpage
180
Keywords
Capacitance; Doping; Electromechanical sensors; Information geometry; Mesh generation; Semiconductor process modeling; Slabs; Solid modeling; Very large scale integration; Visualization;
fLanguage
English
Publisher
ieee
Conference_Titel
Numerical Modeling of Processes and Devices for Integrated Circuits, 1992. NUPAD IV. Workshop on
Print_ISBN
0-7803-0516-7
Type
conf
DOI
10.1109/NUPAD.1992.674100
Filename
674100
Link To Document