Title :
Enhanced Characteristics of V0.95W0.05OX-Based Uncooled Microbolometer
Author :
Moon, Sung ; Han, Yong-Hee ; Kim, Kun-Tae ; Lee, Seung-Hoon ; Shin, Hyun-Joon
Author_Institution :
Microsystem Res. Center, Korea Inst. of Sci. & Technol., Seoul
fDate :
Oct. 30 2005-Nov. 3 2005
Abstract :
In this work, high-performance uncooled microbolometer was fabricated by using vanadium tungsten oxide as a infrared-sensitive material and its bolometric properties was characterized. As a bolometric material, the optimized V0.95W0.05Ox thin film has a high TCR value over - 3.0%/K and low noise properties compared with VOx thin film. The fabricated V0.95W0.05Ox-based microbolometer was vacuum-packaged and equipped with thermal electric cooler for the measurement of bolometric properties. The TCR value of the fabricated device was -3.49%/K at room temperature resistance of 71 kOmega and the measured thermal conductance was 6.1times10-7 W/K. Finally, we obtained high responsivity over 1.8times104 W/K and high detectivity over 1.3times109 cmHzfrac12/W at a chopper frequency of 10 Hz and a bias current of 7.4 muA
Keywords :
bolometers; infrared detectors; microsensors; tungsten compounds; vanadium compounds; 10 Hz; 7.4 muA; 71 kohm; V0.95W0.05Ox thin film; VWO; infrared-sensitive material; thermal electric cooler; uncooled microbolometer; vacuum-packaged microbolometer; vanadium tungsten oxide; Current measurement; Electric resistance; Electric variables measurement; Electrical resistance measurement; Frequency measurement; Temperature; Thermal conductivity; Thermal resistance; Transistors; Tungsten;
Conference_Titel :
Sensors, 2005 IEEE
Conference_Location :
Irvine, CA
Print_ISBN :
0-7803-9056-3
DOI :
10.1109/ICSENS.2005.1597905
