Title :
Fabrication of Pt-Polysilicon Thin-Film Thermopiles: A Preliminary Study
Author :
Mancarella, Fulvio ; Roncaglia, Alberto ; Tamarri, Fabrizio ; Pizzochero, Giulio ; Cardinali, Gian Carlo ; Severi, Maurizio
Author_Institution :
Inst. of Microelectron. & Microsystems, National Res. Council, Bologna
fDate :
Oct. 30 2005-Nov. 3 2005
Abstract :
A preliminary study is proposed aimed at developing a novel process for thin film thermopile detectors based on Pt-polysilicon thermoelements realized on a silicon substrate. Good contacts between Pt and heavily doped n and p-polysilicon have been achieved by using a Ti/TiN/Pt barrier structure. Step coverage of Pt on 300 nm high polysilicon steps obtained by RIE etching has been evaluated by wafer level measurements. The experimentally estimated process yield turns out to be higher than 90%. Mechanical stability of suspended dielectric structures covered with platinum has been evaluated by front-side micromachined test devices and the expected performance has been estimated by sensitivity tests on realized devices
Keywords :
platinum; silicon; sputter etching; thermopiles; titanium compounds; 300 nm; RIE etching; Ti-TiN-Pt; dielectric structures; doped n polysilicon; doped p-polysilicon; high polysilicon steps; mechanical stability; micromachined test devices; poly silicon thin-film thermopile; silicon substrate; thin film thermopile detectors; wafer level measurements; Detectors; Etching; Fabrication; Level measurement; Semiconductor thin films; Silicon; Substrates; Testing; Tin; Transistors;
Conference_Titel :
Sensors, 2005 IEEE
Conference_Location :
Irvine, CA
Print_ISBN :
0-7803-9056-3
DOI :
10.1109/ICSENS.2005.1597906
