Title :
Gas Sensing Properties of TiO2-WO3 and TiO2-MO3 Based Thin Film Prepared by Ion-Assisted E-Beam Evaporation
Author :
Wisitsoraat, A. ; Tuantranont, A. ; Comini, E. ; Sberveglieri, G. ; Wlodarski, W.
Author_Institution :
National Electron. & Comput. Technol. Center, Pathumthani
fDate :
Oct. 30 2005-Nov. 3 2005
Abstract :
This work presents new results on the gas sensing studies of WO 3 and MO3 doped TiO2 thin films prepared by ion-assisted e-beam evaporation process. N-type TiO2 gas-sensing layers have been deposited with different doping concentrations. Structural and morphological characterization has been carried out by means of SEM and XRI in order to correlate physical properties with gas sensing performance. Electrical characterizations highlight interesting behavior for the layers tested. The films proved to be sensitive to CO, NO2, acetone and ethylene with different sensitivity, selectivity, and minimum detectable concentration. TiO2-WO3 showed high response towards acetone and ethylene at lower working temperature. TiO2 -MoO3 showed good response towards CO. Furthermore, TiO 2-WO3 exhibited increased response magnitude towards NO2 compared to TiO2-MoO3 layers
Keywords :
electron beam applications; gas sensors; materials preparation; metallic thin films; molybdenum compounds; scanning electron microscopy; titanium compounds; tungsten compounds; vacuum deposition; CO; NO2; SEM; TiO2-MoO3; TiO2-WO3; XRI; doping concentration; gas sensing property; ion-assisted e-beam evaporation; morphological characterization; structural characterization; Coatings; Fabrication; Gas detectors; Optical filters; Optical materials; Temperature sensors; Testing; Thin film sensors; Transistors; Tungsten;
Conference_Titel :
Sensors, 2005 IEEE
Conference_Location :
Irvine, CA
Print_ISBN :
0-7803-9056-3
DOI :
10.1109/ICSENS.2005.1597917
