• DocumentCode
    3305860
  • Title

    Technology Advances in Batch Production of Pt-Doped TiO2 Sol-Gel Oxygen Sensor

  • Author

    Francioso, Luca ; Presicce, Dominique Sara ; Siciliano, Pietro ; Epifani, Mauro

  • Author_Institution
    Sezione di Lecce, CNR-IMM, Lecce
  • fYear
    2005
  • fDate
    Oct. 30 2005-Nov. 3 2005
  • Firstpage
    1192
  • Lastpage
    1195
  • Abstract
    Aim of this work is the evaluation of a batch production fabrication run of a cheap sol-gel Pt-doped TiO2 thin film sensor on silicon substrate. The sensor is implemented as microsensors for lambda factor detection, while a preliminary investigation on real operative conditions shows that these devices perform a response time (t 90) in real condition around 1 second at 600 degC. Experimental tests in comparison with a commercial lambda probe were carried out
  • Keywords
    batch processing (industrial); gas sensors; microsensors; oxygen; platinum; sol-gel processing; thin film devices; titanium compounds; 600 C; TiO2:Pt; batch production fabrication; commercial lambda probe; lambda factor detection; microsensors; silicon substrate; sol-gel oxygen sensor; thin film sensor; Delay; Fabrication; Microsensors; Oxygen; Probes; Production; Silicon; Substrates; Testing; Thin film sensors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Sensors, 2005 IEEE
  • Conference_Location
    Irvine, CA
  • Print_ISBN
    0-7803-9056-3
  • Type

    conf

  • DOI
    10.1109/ICSENS.2005.1597919
  • Filename
    1597919
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3305860