DocumentCode

330612

Title

Mask Contamination Induced by X-Ray Exposure

Author

Okada, I. ; Saitoh, Y. ; Deguchi, K. ; Fukuda, M. ; Ban, H. ; Matsuda, T.

Author_Institution

NTT System Electronics Laboratories

fYear

1998

fDate

13-16 July 1998

Firstpage

17

Lastpage

18

Keywords

Coatings; Contamination; Energy resolution; Fabrication; Integrated circuit technology; Laboratories; Lithography; Resists; Ultraviolet sources; Water pollution;

fLanguage

English

Publisher

ieee

Conference_Titel

Microprocesses and Nanotechnology Conference, 1998 International

Conference_Location

Kyoungju, South Korea

Print_ISBN

4-930813-83-2

Type

conf

DOI

10.1109/IMNC.1998.729923

Filename

729923