DocumentCode
330613
Title
Evaluation Of Lithographic Performance Of X-Ray Stepper XS-1
Author
Taguchi, T. ; Mitsui, S. ; Tanaka, Y. ; Fujii, K. ; Sugihara, S. ; Yamaguchi, K. ; Kikuchi, Y. ; Tsuboi, S. ; Aoyama, H. ; Nakayama, N. ; Marumoto, K. ; Yamabe, M. ; Suzuki, K. ; Gomei, Y. ; Hisatsugu, T. ; Fukuda, M. ; Suzuki, M. ; Haga, T. ; Itabashi, S
Author_Institution
Association of Super-Advanced Electronics Technologies (ASET)
fYear
1998
fDate
13-16 July 1998
Firstpage
19
Lastpage
20
Keywords
Controllability; Electrons; Fabrication; Histograms; Laboratories; Optical reflection; Performance evaluation; Silicon compounds; Strontium; X-ray lithography;
fLanguage
English
Publisher
ieee
Conference_Titel
Microprocesses and Nanotechnology Conference, 1998 International
Conference_Location
Kyoungju, South Korea
Print_ISBN
4-930813-83-2
Type
conf
DOI
10.1109/IMNC.1998.729924
Filename
729924
Link To Document