Title :
Enhancement Of Ionization In Ionized PVD By RF Pulsing And Magnetic Field
Author_Institution :
Kunsan National University
Keywords :
Argon; Atherosclerosis; Coils; Ionization; Magnetic fields; Optical pulses; Plasma sources; Pulsed power supplies; Radio frequency; Sputtering;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 1998 International
Conference_Location :
Kyoungju, South Korea
Print_ISBN :
4-930813-83-2
DOI :
10.1109/IMNC.1998.729929
