DocumentCode

330616

Title

Enhancement Of Ionization In Ionized PVD By RF Pulsing And Magnetic Field

Author

Joo, Junghoon

Author_Institution

Kunsan National University

fYear

1998

fDate

13-16 July 1998

Firstpage

25

Lastpage

26

Keywords

Argon; Atherosclerosis; Coils; Ionization; Magnetic fields; Optical pulses; Plasma sources; Pulsed power supplies; Radio frequency; Sputtering;

fLanguage

English

Publisher

ieee

Conference_Titel

Microprocesses and Nanotechnology Conference, 1998 International

Conference_Location

Kyoungju, South Korea

Print_ISBN

4-930813-83-2

Type

conf

DOI

10.1109/IMNC.1998.729929

Filename

729929