• DocumentCode
    330621
  • Title

    Thin Film Growths And Surface Modification By keV Ion Beams

  • Author

    Seok-Keun Koh ; Won-Kook Choi ; Hyung-Jin Jung ; Klalkina, E. ; Kondranin, S.

  • Author_Institution
    Thin Film Technology Research Center, Korea Institute of Science and Technology
  • fYear
    1998
  • fDate
    13-16 July 1998
  • Firstpage
    35
  • Lastpage
    35
  • Keywords
    Gas detectors; Ion beams; Ion sources; Plasma applications; Plasma sources; Polymer films; Research and development; Rough surfaces; Surface roughness; Transistors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microprocesses and Nanotechnology Conference, 1998 International
  • Conference_Location
    Kyoungju, South Korea
  • Print_ISBN
    4-930813-83-2
  • Type

    conf

  • DOI
    10.1109/IMNC.1998.729938
  • Filename
    729938
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=330621