Title :
MEMS: From Research To Applications
Author :
Sandmaier, H. ; Lang, W.
Author_Institution :
Hahn Schickard Gesellschaft
Keywords :
Actuators; Costs; Europe; Manufacturing industries; Micromechanical devices; Product development; Production; Prototypes; Research and development; World Wide Web;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 1998 International
Conference_Location :
Kyoungju, South Korea
Print_ISBN :
4-930813-83-2
DOI :
10.1109/IMNC.1998.729958
