Title :
Microelectromechancial Systems (MEMS) At The UCLA Micromanufacturing Lab
Author :
Kim, Chang-Jin CJ
Author_Institution :
University of California
Keywords :
Aerospace engineering; Fabrication; Microchannel; Microinjection; Micromachining; Micromechanical devices; Micromotors; Microswitches; Surface tension; Wafer bonding;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 1998 International
Conference_Location :
Kyoungju, South Korea
Print_ISBN :
4-930813-83-2
DOI :
10.1109/IMNC.1998.729959
