Title :
Development Of Silicon Based Inertial Sensor In SAIT
Author_Institution :
Samsung Advanced Institute of Technology (SAIT)
Keywords :
Accelerometers; Capacitive sensors; Capacitors; Electrodes; Electrostatics; Fabrication; Force sensors; Gyroscopes; Mechanical sensors; Silicon;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 1998 International
Conference_Location :
Kyoungju, South Korea
Print_ISBN :
4-930813-83-2
DOI :
10.1109/IMNC.1998.729962
