DocumentCode

330635

Title

Monte-Carlo Based Optical Proximity Correction For The Half-Tone Phase Shift Mask

Author

Oh, Yong-Ho ; Lee, Jai-Cheol ; Lim, Sungwoo

Author_Institution

Wonkwang University

fYear

1998

fDate

13-16 July 1998

Firstpage

62

Lastpage

63

Keywords

Degradation; Design automation; Image quality; Manufacturing; Physics; Testing; Very large scale integration;

fLanguage

English

Publisher

ieee

Conference_Titel

Microprocesses and Nanotechnology Conference, 1998 International

Conference_Location

Kyoungju, South Korea

Print_ISBN

4-930813-83-2

Type

conf

DOI

10.1109/IMNC.1998.729964

Filename

729964