DocumentCode :
3306419
Title :
Characterization of P-Type Cr:TiO2 Gas Sensor
Author :
Comini, E. ; Faglia, G. ; Sberveglieri, G. ; Alessandri, I. ; Bontempi, E. ; Depero, L.E.
Author_Institution :
Sensor Lab., Brescia Univ.
fYear :
2005
fDate :
Oct. 30 2005-Nov. 3 2005
Firstpage :
1320
Lastpage :
1322
Abstract :
Thin films of Cr-doped TiO2 have been deposited by RF magnetron sputtering, using for the first time a Ti target with a different numbers of Cr inserts. The influence of the Cr content and the annealing treatments upon the structure and the electrical conductivity of thin films have been investigated. The sensing behavior of selected series of samples has been tested to different gases like CO, NO2 and ethanol. P-type conductivity and sensing behavior has been obtained with an enhancement in the sensing performances of titania doped layers
Keywords :
annealing; chromium; gas sensors; organic compounds; sputtered coatings; titanium compounds; P-type conductivity; RF magnetron sputtering; TiO2:Cr; annealing treatment; electrical conductivity; ethanol; gas sensors; thin film; Annealing; Chemicals; Chromium; Conductivity; Gas detectors; Optical films; Sensor phenomena and characterization; Sputtering; Substrates; Testing;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Sensors, 2005 IEEE
Conference_Location :
Irvine, CA
Print_ISBN :
0-7803-9056-3
Type :
conf
DOI :
10.1109/ICSENS.2005.1597950
Filename :
1597950
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3306419
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