Photoresist Exposure Parameter Extraction From Refractive Index Change During Exposure

Author

Young-Soo Sohn ; Moon-Gyu Sung ; Jin-Kyung Oh ; Sung-Hwan Byun ; Yeon-Un Jung ; Hye-Keun Oh ; Ilsin An ; Kun-Sang Lee ; In-Ho Park ; Joon-Yeon Cho ; Sang-Ho Lee

Author_Institution

Hanyang University

fYear

1998

fDate

13-16 July 1998

Firstpage

Lastpage

Keywords

Chemicals; Data mining; Extinction coefficients; Parameter extraction; Physics; Refractive index;

fLanguage

English

Publisher

ieee

Conference_Titel

Microprocesses and Nanotechnology Conference, 1998 International

Conference_Location

Kyoungju, South Korea

Print_ISBN

4-930813-83-2

Type

DOI

10.1109/IMNC.1998.729977

Filename

729977

Link To Document