• DocumentCode
    330646
  • Title

    Simple Method For Resist CD Prediction

  • Author

    Nakao, Shuji ; Mastubara, Hiroshi ; Yamaguchi, Astumi ; Sakaki, Junjiroh ; Nakae, Akihiro ; Tatsu, Shin-ichiroh ; Tsujita, Koichiroh

  • Author_Institution
    Mitsubishi Electric Corporation
  • fYear
    1998
  • fDate
    13-16 July 1998
  • Firstpage
    82
  • Lastpage
    83
  • Keywords
    Laboratories; Large scale integration; Large-scale systems; Lighting; Linear approximation; Resists; Ultra large scale integration;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microprocesses and Nanotechnology Conference, 1998 International
  • Conference_Location
    Kyoungju, South Korea
  • Print_ISBN
    4-930813-83-2
  • Type

    conf

  • DOI
    10.1109/IMNC.1998.729978
  • Filename
    729978
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=330646