مرکز منطقه ای اطلاع رساني علوم و فناوري

DocumentCode :

330646

Title :

Simple Method For Resist CD Prediction

Author :

Nakao, Shuji ; Mastubara, Hiroshi ; Yamaguchi, Astumi ; Sakaki, Junjiroh ; Nakae, Akihiro ; Tatsu, Shin-ichiroh ; Tsujita, Koichiroh

Author_Institution :

Mitsubishi Electric Corporation

fYear :

1998

fDate :

13-16 July 1998

Firstpage :

Lastpage :

Keywords :

Laboratories; Large scale integration; Large-scale systems; Lighting; Linear approximation; Resists; Ultra large scale integration;

fLanguage :

English

Publisher :

ieee

Conference_Titel :

Microprocesses and Nanotechnology Conference, 1998 International

Conference_Location :

Kyoungju, South Korea

Print_ISBN :

4-930813-83-2

Type :

conf

DOI :

10.1109/IMNC.1998.729978

Filename :

729978

Link To Document :