Title :
Novel Fabrication Of Electroplated 3D Micro-Coils Using 3D Photolithography Of Thick Photoresist
Author :
Yoon, J.-B. ; Han, C.-H. ; Yoon, E.-S. ; Kim, C.K.
Author_Institution :
KAIST
Keywords :
Bridges; Coils; Fabrication; Lithography; Resists;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 1998 International
Conference_Location :
Kyoungju, South Korea
Print_ISBN :
4-930813-83-2
DOI :
10.1109/IMNC.1998.729981
