DocumentCode

330648

Title

Novel Fabrication Of Electroplated 3D Micro-Coils Using 3D Photolithography Of Thick Photoresist

Author

Yoon, J.-B. ; Han, C.-H. ; Yoon, E.-S. ; Kim, C.K.

Author_Institution

KAIST

fYear

1998

fDate

13-16 July 1998

Firstpage

85

Lastpage

86

Keywords

Bridges; Coils; Fabrication; Lithography; Resists;

fLanguage

English

Publisher

ieee

Conference_Titel

Microprocesses and Nanotechnology Conference, 1998 International

Conference_Location

Kyoungju, South Korea

Print_ISBN

4-930813-83-2

Type

conf

DOI

10.1109/IMNC.1998.729981

Filename

729981