Title :
H/sub 2/ and NO/sub 2/ gas sensors with ZnO nanobelt layer on 36/spl deg/ LiTaO/sub 3/ and 64/spl deg/ LiNbO/sub 3/ SAW transducers
Author :
Sadek, A.Z. ; Wlodarski, W. ; Kalantar-zadeh, K. ; Powell, D.A. ; Hughes, W.L. ; Buchine, B.A. ; Wang, Z.L.
Author_Institution :
Sch. of Electr. & Comput. Eng., RMIT Univ., Melbourne, Vic.
fDate :
Oct. 30 2005-Nov. 3 2005
Abstract :
Single crystal nanobelts of ZnO were synthesized and deposited onto 36deg YX LiTaO3 and 64deg YX LiNbO3 surface acoustic wave (SAW) devices for gas sensing applications. Sensor response, defined as the change in resonant frequency, was measured for H2 and NO2 between 20 and 200degC. Measured sensor responses were 3.5 kHz towards 10 ppm NO2 for a 64deg LiNbO3 SAW transducer operating at 160degC and 3 kHz towards 1% H2 for a 36deg LiTaO3 SAW transducer operating at 185degC temperature
Keywords :
gas sensors; hydrogen; lithium compounds; nanostructured materials; niobium compounds; nitrogen compounds; surface acoustic wave transducers; tantalum compounds; zinc compounds; 160 C; 185 C; 3 kHz; 3.5 kHz; H2; LiNbO3; LiTaO3; NO2; SAW transducers; ZnO; gas sensing applications; gas sensors; single crystal nanobelts; surface acoustic wave devices; Acoustic measurements; Acoustic sensors; Acoustic transducers; Acoustic waves; Gas detectors; Nanoscale devices; Resonant frequency; Surface acoustic wave devices; Surface acoustic waves; Zinc oxide;
Conference_Titel :
Sensors, 2005 IEEE
Conference_Location :
Irvine, CA
Print_ISBN :
0-7803-9056-3
DOI :
10.1109/ICSENS.2005.1597956
