H/sub 2/ and NO/sub 2/ gas sensors with ZnO nanobelt layer on 36/spl deg/ LiTaO/sub 3/ and 64/spl deg/ LiNbO/sub 3/ SAW transducers

Author

Sadek, A.Z. ; Wlodarski, W. ; Kalantar-zadeh, K. ; Powell, D.A. ; Hughes, W.L. ; Buchine, B.A. ; Wang, Z.L.

Author_Institution

Sch. of Electr. & Comput. Eng., RMIT Univ., Melbourne, Vic.

fYear

2005

fDate

Oct. 30 2005-Nov. 3 2005

Abstract

Single crystal nanobelts of ZnO were synthesized and deposited onto 36deg YX LiTaO₃ and 64deg YX LiNbO₃ surface acoustic wave (SAW) devices for gas sensing applications. Sensor response, defined as the change in resonant frequency, was measured for H₂ and NO₂ between 20 and 200degC. Measured sensor responses were 3.5 kHz towards 10 ppm NO₂ for a 64deg LiNbO₃ SAW transducer operating at 160degC and 3 kHz towards 1% H₂ for a 36deg LiTaO₃ SAW transducer operating at 185degC temperature

Keywords

gas sensors; hydrogen; lithium compounds; nanostructured materials; niobium compounds; nitrogen compounds; surface acoustic wave transducers; tantalum compounds; zinc compounds; 160 C; 185 C; 3 kHz; 3.5 kHz; H₂; LiNbO₃; LiTaO₃; NO₂; SAW transducers; ZnO; gas sensing applications; gas sensors; single crystal nanobelts; surface acoustic wave devices; Acoustic measurements; Acoustic sensors; Acoustic transducers; Acoustic waves; Gas detectors; Nanoscale devices; Resonant frequency; Surface acoustic wave devices; Surface acoustic waves; Zinc oxide;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2005 IEEE

Conference_Location

Irvine, CA

Print_ISBN

0-7803-9056-3

Type

conf

DOI

10.1109/ICSENS.2005.1597956

Filename

1597956