DocumentCode :
330652
Title :
Proposal Of The Coma Aberration Dependent Overlay Error Compensation Technology
Author :
Asai, Naoko ; Hasegawa, Norio ; Gotoh, Yasuko ; Satoh, Hidetoshi ; Hayano, Katsuya ; Imai, Akira ; Okazaki, Shinji
Author_Institution :
Hitachi, Ltd.
fYear :
1998
fDate :
13-16 July 1998
Firstpage :
93
Lastpage :
94
Keywords :
Distortion measurement; Error compensation; Frequency dependence; Laboratories; Lenses; Lighting; Position measurement; Proposals; Semiconductor device measurement; Shape;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microprocesses and Nanotechnology Conference, 1998 International
Conference_Location :
Kyoungju, South Korea
Print_ISBN :
4-930813-83-2
Type :
conf
DOI :
10.1109/IMNC.1998.729986
Filename :
729986
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=330652
