DocumentCode

330660

Title

Measuring Odd Component Of Aberration Function Utilizing Alternating PSM

Author

Nakao, Shuji ; Miyazaki, Junji ; Tsujita, Kouichirou ; Wakamiya, Wataru

Author_Institution

Mitsubishi Electric Corporation

fYear

1998

fDate

13-16 July 1998

Firstpage

109

Lastpage

110

Keywords

Area measurement; Electric variables measurement; Electrodes; Position measurement; Testing; Thickness measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Microprocesses and Nanotechnology Conference, 1998 International

Conference_Location

Kyoungju, South Korea

Print_ISBN

4-930813-83-2

Type

conf

DOI

10.1109/IMNC.1998.729996

Filename

729996