DocumentCode

330663

Title

Thermal Distortion Of An X-Ray Mask For Synchrotron Radiation Lithography

Author

Yang, J. ; Kawachi, S. ; Toyota, E.

Author_Institution

Sumitomo Heavy Industries, Ltd.

fYear

1998

fDate

13-16 July 1998

Firstpage

115

Lastpage

116

Keywords

Biomembranes; Lithography; Mirrors; Optical beams; Optical control; Optical distortion; Shape; Strontium; Synchrotron radiation; Temperature;

fLanguage

English

Publisher

ieee

Conference_Titel

Microprocesses and Nanotechnology Conference, 1998 International

Conference_Location

Kyoungju, South Korea

Print_ISBN

4-930813-83-2

Type

conf

DOI

10.1109/IMNC.1998.729999

Filename

729999