DocumentCode :
330663
Title :
Thermal Distortion Of An X-Ray Mask For Synchrotron Radiation Lithography
Author :
Yang, J. ; Kawachi, S. ; Toyota, E.
Author_Institution :
Sumitomo Heavy Industries, Ltd.
fYear :
1998
fDate :
13-16 July 1998
Firstpage :
115
Lastpage :
116
Keywords :
Biomembranes; Lithography; Mirrors; Optical beams; Optical control; Optical distortion; Shape; Strontium; Synchrotron radiation; Temperature;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microprocesses and Nanotechnology Conference, 1998 International
Conference_Location :
Kyoungju, South Korea
Print_ISBN :
4-930813-83-2
Type :
conf
DOI :
10.1109/IMNC.1998.729999
Filename :
729999
Link To Document :
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