DocumentCode
330664
Title
High-Transmittance SiC Membrane Prepared By ECR Plasma CVD In Combination With Rapid Thermal Annealing
Author
Song, Ki-Chang ; Lee, Don-Hee ; Jeon, Young-Sam ; Park, Chil-Keun ; Noh, Hyun Pil ; Lee, Seung-Yoon ; Lee, Tae-Ho ; Kang, Jung-Ho ; Ahn, Jinho
Author_Institution
LG Corporate Institute of Technology
fYear
1998
fDate
13-16 July 1998
Firstpage
117
Lastpage
118
Keywords
Biomembranes; Compressive stress; Optical films; Plasma temperature; Rapid thermal annealing; Residual stresses; Rough surfaces; Silicon carbide; Surface roughness; Thermal stresses;
fLanguage
English
Publisher
ieee
Conference_Titel
Microprocesses and Nanotechnology Conference, 1998 International
Conference_Location
Kyoungju, South Korea
Print_ISBN
4-930813-83-2
Type
conf
DOI
10.1109/IMNC.1998.730001
Filename
730001
Link To Document